Breakdown Behavior in Radio-frequency Argon Discharges

Heather Smith; Christine Charles; Roderick Boswell

doi:10.1063/1.1531615

Breakdown Behavior in Radio-frequency Argon Discharges

Heather Smith, Christine Charles, Roderick Boswell

Research output: Contribution to journal › Article

Abstract

The radio-frequency breakdown in argon gas was investigated by using particle-in-cell simulation technique. A zero-dimensional global model was developed to study the experimental and simulated measurements of breakdown. It was found that the simulation results were in agreement with respect to the experimental results.

Original language	English
Pages (from-to)	875-881
Journal	Physics of Plasmas
Volume	10
Issue number	3
DOIs	https://doi.org/10.1063/1.1531615
Publication status	Published - 2003

Access to Document

10.1063/1.1531615

Cite this

@article{79c54a1227e34f66bb0af19d76f74756,

title = "Breakdown Behavior in Radio-frequency Argon Discharges",

abstract = "The radio-frequency breakdown in argon gas was investigated by using particle-in-cell simulation technique. A zero-dimensional global model was developed to study the experimental and simulated measurements of breakdown. It was found that the simulation results were in agreement with respect to the experimental results.",

author = "Heather Smith and Christine Charles and Roderick Boswell",

year = "2003",

doi = "10.1063/1.1531615",

language = "English",

volume = "10",

pages = "875--881",

journal = "Physics of Plasmas",

issn = "1070-664X",

publisher = "American Institute of Physics",

number = "3",

}

TY - JOUR

T1 - Breakdown Behavior in Radio-frequency Argon Discharges

AU - Smith, Heather

AU - Charles, Christine

AU - Boswell, Roderick

PY - 2003

Y1 - 2003

N2 - The radio-frequency breakdown in argon gas was investigated by using particle-in-cell simulation technique. A zero-dimensional global model was developed to study the experimental and simulated measurements of breakdown. It was found that the simulation results were in agreement with respect to the experimental results.

AB - The radio-frequency breakdown in argon gas was investigated by using particle-in-cell simulation technique. A zero-dimensional global model was developed to study the experimental and simulated measurements of breakdown. It was found that the simulation results were in agreement with respect to the experimental results.

U2 - 10.1063/1.1531615

DO - 10.1063/1.1531615

M3 - Article

SN - 1070-664X

VL - 10

SP - 875

EP - 881

JO - Physics of Plasmas

JF - Physics of Plasmas

IS - 3

ER -

Breakdown Behavior in Radio-frequency Argon Discharges

Abstract

Access to Document

Fingerprint

Cite this