Breakdown Behavior in Radio-frequency Argon Discharges

Heather Smith, Christine Charles, Roderick Boswell

    Research output: Contribution to journalArticle

    Abstract

    The radio-frequency breakdown in argon gas was investigated by using particle-in-cell simulation technique. A zero-dimensional global model was developed to study the experimental and simulated measurements of breakdown. It was found that the simulation results were in agreement with respect to the experimental results.
    Original languageEnglish
    Pages (from-to)875-881
    JournalPhysics of Plasmas
    Volume10
    Issue number3
    DOIs
    Publication statusPublished - 2003

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