Abstract
The radio-frequency breakdown in argon gas was investigated by using particle-in-cell simulation technique. A zero-dimensional global model was developed to study the experimental and simulated measurements of breakdown. It was found that the simulation results were in agreement with respect to the experimental results.
Original language | English |
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Pages (from-to) | 875-881 |
Journal | Physics of Plasmas |
Volume | 10 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2003 |